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Model No: ROBOT DISTRIBUTION S8000
img{max-width:100%} AMAT Applied Materials 0040-22126 Bellows Assembly OEM Refurbished
but the kit is missing the Plenum Sheild
The unit ramped up to full speed and pumped down to 11 mTorr with undetermined hours of run time
KLA-Tencor Part No: 11020618106000
Aera PI-98 Series Mass Flow Controller MFC Reseller Lot of 9 Working Surplus Model No: ROBOT DISTRIBUTION S8000Aera PI 98 Series Mass Flow Controller MFC Reseller Lot of 9 Working Surplus Part No: PI 98 Series Interface: DeviceNet Fitting: Surface Mount May Require Calibration Reseller Lot of 9 Made in China Included Components Part No: FCPI980CBAXDIAA; 300 SCCM, HCl Part No: FCPI980CBAXDIAA; 500 SCCM, HCl Part No: FCPI980CBAXDIDJAA: 600 SCCM, HCl Part No: FCPI980CBAXDIDJAA; 60 SCCM, Si2H6 Part No: FCPI980CBAXDIAA; 300 SCCM, Si2H6 Part No: FCPI980CBAXDIDJAA;
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