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TEL Tokyo Electron 3S87-052823-11 Antenna L Assembly GS Trias CF,CN,-,CO Spare Pentagon Technologies 0020-26403 Cover RingTEL Tokyo Electron 3S87 052823 11 Antenna L Assembly GS Trias CF,CN, ,CO Spare Inventory # A 17703 Part No: 3S87 052823 11 SPARE ANTENNA(L) ASSY,GS Removed from a TEL Tokyo Electron Trias CF,CN, ,CO Radical Process Reactor System This TEL Tokyo Electron 3S87 052823 11 Antenna L Assembly GS Trias CF,CN, ,CO Spare is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used